ELECTROSTATIC ENERGY ANALYSER OF CHARGED PARTICLES Russian patent published in 2011 - IPC H01J49/22 

FIELD: electricity.

SUBSTANCE: invention refers to energy analysis of flows of charged particles charged with X-ray radiation from solid body surface and can be used for improvement of analytical, operating and consumer properties of electronic spectrometres used for investigation of objects of micro- and nanoelectronics by methods of X-ray-and-electronic spectroscopy. Method is implemented by using three-stage electrostatic energy analyser of charged particles, which provides for angular focusing of the second order of "axis-ring" type and range of entrance angles, within which photoelectrons 60°±2° are analysed, which allows coaxially building of X-ray source into analyser; at that, almost at minimum possible distance from sample.

EFFECT: improving the main operating parameter of analyser, sensitivity with simultaneous simplification of layout of spectrometer as a whole.

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