FIELD: gas-discharge equipment.
SUBSTANCE: near infrared radiation is singled out from radiation spectrum of vacuum ultraviolet radiation source, fed to registration photo-electric receiver and on basis of its measured intensiveness, intensiveness of vacuum ultraviolet radiation is evaluated.
EFFECT: it is possible to determine xenon radiation intensiveness in finished tools without phosphor.
5 dwg, 1 tbl
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Authors
Dates
2007-04-10—Published
2006-01-12—Filed