METHOD FOR DETERMINING INTENSIVENESS OF VACUUM ULTRAVIOLET RADIATION OF XENON Russian patent published in 2007 - IPC G01N21/00 

Abstract RU 2296980 C1

FIELD: gas-discharge equipment.

SUBSTANCE: near infrared radiation is singled out from radiation spectrum of vacuum ultraviolet radiation source, fed to registration photo-electric receiver and on basis of its measured intensiveness, intensiveness of vacuum ultraviolet radiation is evaluated.

EFFECT: it is possible to determine xenon radiation intensiveness in finished tools without phosphor.

5 dwg, 1 tbl

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RU 2 296 980 C1

Authors

Lebed' Vitalij Nikolaevich

Chizhikov Aleksej Egorovich

Dates

2007-04-10Published

2006-01-12Filed