COLD-CATHODE ION SOURCE Russian patent published in 2007 - IPC H01J27/04 

FIELD: heavy-current plasma and ion beam generation.

SUBSTANCE: proposed cold-cathode ion source has plasma cathode whose set of electrodes includes glow-discharge hollow cathode, igniter electrode, and anode grid; plasma generator incorporating main anode and screen grid with ion extraction holes electrically connected to anode grid and placed at negative potential relative to main hollow anode whose surface mounts set of permanent magnets for producing peripheral multipole magnetic system. Anode grid is mounted on hollow glow-discharge anode end facing main anode, its opposite end mounts diaphragm with anode aperture coaxial with cathode aperture, following relations being satisfied: d_a > d_c and d_g < D - 2h, where d_a, d_c, d_g, D is diameter of anode aperture, diameter of cathode aperture, diameter of anode grid, and diameter of main anode, respectively; h is minimal distance between rows of different-polarity permanent magnets.

EFFECT: enhanced power efficiency, gas economic efficiency, reliability, and service life of ion source at same mass and size; simplified design.

1 cl, 1 dwg