METHOD OF DEPOSITING AMORPHOUS HYDROCARBON COATINGS Russian patent published in 2010 - IPC C23C14/16 C23C14/48 

FIELD: chemistry.

SUBSTANCE: method of depositing amorphous hydrocarbon coating on an object made from metallic material using a plasma cathode, containing a hollow cathode, an igniter electrode and an anode grid, involves ion-beam cleaning of the surface of the object placed in the plasma chamber by releasing chemically inert gas into the hollow cathode, application of voltage between the hollow cathode, igniter electrode and anode grid and application of pulsed voltage between the anode and walls of the vacuum chamber. A transition layer of atoms of the material of the object and immersion ion implantation carbon is formed by releasing into the plasma chamber at least one hydrocarbon-containing gas and igniting an assisted pulse-periodic discharge between the anode and walls of the vacuum chamber. Ions bombarding the surface of the object are accelerated by bias voltage of 1-10 kV. The hydrocarbon coating is deposited by igniting an assisted pulsed-periodic electrical discharge while applying pulsed-periodic voltage between walls of the plasma chamber and the anode in the mixture of chemically inert gas and at least one hydrocarbon-containing gas.

EFFECT: obtained coatings have high hardness, chemical inertness, low friction, high electrical resistance and heat conductivity.

2 dwg, 1 ex