METHOD OF INCREASING LIFE OF SELF-GLOWING HOLLOW CATHODE IN HIGH-DENSITY DISCHARGE IN AXIALLY-SYMMETRIC MAGNETIC FIELD Russian patent published in 2018 - IPC H05H1/24 H01J17/04 

FIELD: physics.

SUBSTANCE: method of increasing the life of a cathode is based on a change in the conditions of discharge burning in the cathode cavity when a sharply inhomogeneous axisymmetric magnetic field is applied. With the help of annular permanent magnets, a highly inhomogeneous magnetic field is created, the maximum of which is located in the plane of the output aperture of the cathode, as a result of which the active discharge zone, characterized by the maximum emission current density and cathode erosion rate, is localized on the end surface of the cathode. Increasing the cathode life is provided by creating conditions under which the cathode wear occurs not only in the radial but also in the longitudinal direction by moving the cathode or magnets as the cathode is eroded, at which the position of the maximum of the magnetic field in the plane of the cathode end remains. A plasma generator based on a discharge with a self-glowing hollow cathode can be used both in magnetron coating systems to increase the current density of the ion tracking, and in devices for chemical deposition of coatings for plasma activation of reactant interactions in the working volume.

EFFECT: increase in the service life of a tubular self-glowing hollow cathode in an axially-symmetric magnetic field.

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