FIELD: semiconductors, possible use for manufacturing semiconductor for feeding ultra-pure liquids to substrate surface in processes of chemical-mechanical planarization, photo-lithography, application of dielectrics.
SUBSTANCE: feeding system contains liquid reservoir, to inlet and outlet apertures of which first and second flow control devices and pressure indicators are connected respectively. To second flow control device, made in form of sphincter valve, mass Coriolis flow meter is connected, containing flow meter pipe made of plastic, ensuring high degree of liquid purity. Perfluorinealkox is used as material for flow meter pipe. Output signals of pressure indicators and Coriolis flow meter are received at controller, feeding control signals to control devices for measuring pressure in reservoir and the flow of liquid from it.
EFFECT: precise control of pressure and flow in real time scale, without injection of polluting substances into liquid being fed.
3 cl, 12 dwg
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