MASS FLOW REGULATOR BASED ON CORIOLIS PRINCIPLE, MADE OF CHEMICALLY INERT MATERIAL (VARIANTS) Russian patent published in 2007 - IPC G05D7/06 G01F1/84 F16K31/12 

FIELD: possible use in technological processes requiring feeding of ultra pure flowing substance: during manufacture of semiconductors, in pharmaceutical industry, bio technology.

SUBSTANCE: in accordance to invention, mounted in the case of device are a Coriolis mass flow meter, plastic flow meter tube of which is made of fluorinated polymers (in particular, perfluorine-alcoxy copolymer of poly-formaldehyde), drive for inducing oscillations onto the tube, sensors connected to the tube and a compressive valve. Rubber tube of the valve is made with its possible compression between the rod and base surface of executive mechanism and is connected to flow meter tube by means of flow substance. As material for making the rubber tube, chemically inert plastic is used, namely, fluorinated polymers. Case also contains a controller for receiving output signal from the Coriolis flow meter and sending controlling signal to executive mechanism in accordance to output signal of flow meter and signal of given value of value being controlled.

EFFECT: precise flow control, improved compactness of device, prevented pollution of environment due to transfer of undesirable ions.

3 cl, 14 dwg