FIELD: the invention refers for systems using super-pure material(for example in production of semiconductors).
SUBSTANCE: in the process of manufacturing of the Coriolis flowmeter out of plastic at least one flow-measuring tube with an attached drive and sensors is connected with the foundation. The inlet and outlet ends of flow-measuring tube are fixed to technological connections which are also connected with the foundation. The flow-measuring tube and the connections are fulfilled out of perfluorinecoxi copolymer or other fluorocarbon polymer which does not transfer the ions of the material of the flow-measuring tube into the flow of the technological material in order to form a line of super-pure flow through the flowmeter.
EFFECT: increases accuracy of measuring of the material of super-high purity.
45 cl, 16 dwg
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