FIELD: electric engineering, in particular, manufacture of masks meant for creation of integration circuits.
SUBSTANCE: method for producing mask templates includes operations of advance and finishing processing of templates, and also operation for processing masked plates, in neutral water environment, which are realized in laminar stream of deionized water with Raynolds number of 500-1100, at temperature of 15-25°C, during 4-6 minutes, under effect of ultrasound in frequency range of 20-50 kHz. Water flow during cleaning of glass and masked plates is reduced 2,5-3 times.
EFFECT: improved quality of template surface during intensification of process of surface cleaning of glass and masked plates.
2 cl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD OF PHOTO-TEMPLATE STOCKS PRODUCTION | 2006 |
|
RU2329565C1 |
| METHOD FOR PRODUCING PHOTOMASK BLANKS | 2005 |
|
RU2307423C2 |
| METHOD FOR PRODUCING MASK TEMPLATES | 2005 |
|
RU2305918C2 |
| METHOD FOR MAKING PHOTO-TEMPLATE BLANKS | 2005 |
|
RU2292679C2 |
| PROCESS OF PRODUCTION OF MASK WORKSTOCKS | 2001 |
|
RU2208920C1 |
| METHOD FOR PRODUCING PHOTO-TEMPLATE BODIES | 2004 |
|
RU2269213C1 |
| METHOD FOR PRODUCING PHOTOMASK BLANKS | 2004 |
|
RU2319189C2 |
| METHOD FOR PRODUCING PHOTOMASK BLANK | 2004 |
|
RU2274925C1 |
| METHOD FOR PRODUCING PHOTOMASK BLANKS | 2004 |
|
RU2260873C1 |
| METHOD OF PRODUCING SUSPENSION FOR POLISHING GLASS PLATES | 0 |
|
SU1420933A1 |
