VACUUM PLANT Russian patent published in 2007 - IPC C23C14/56 C23C16/54 

Abstract RU 2308539 C2

FIELD: metallurgy.

SUBSTANCE: vacuum plant comprises built-in parts (12), (13), (13a), and (24), e.g., electronic elements, transformers, motors, rolling bearings, and guiding rollers provided with ventilated shells. The guiding rollers (12) are provided with rolling bearings (24) that are mounted on the bearing members (7) and (8) inside the shells. Before filling the vacuum chamber, the shell is filled with gas that removes dust and solid particles from the shell.

EFFECT: improved design.

4 cl, 2 dwg

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RU 2 308 539 C2

Authors

Khajn Stefan

Klem Gjunter

Dates

2007-10-20Published

2005-03-25Filed