DEVICE FOR CHECKING SEMICONDUCTOR ITEMS FOR CHARGE STABILITY USING CORONA DISCHARGE Russian patent published in 2007 - IPC H01L21/66 

Abstract RU 2312424 C1

FIELD: microelectronics.

SUBSTANCE: proposed device that can be used for manufacturing semiconductor items and for analyzing causes of their failure at user's enabling action on open chip with ion stream formed at corona discharge upon their opening while saving contacts has base for mounting semiconductor item plate, enclosed chamber, corona discharge source, high-voltage power supply, regulating member, reference voltage supply, current take-off resistor (100 kΩ), voltmeter, semiconductor item technical data meter, probe handler, probe handler-to-probe coupling unit, pressure gage, and pump.

EFFECT: enhanced precision of diagnostics, enlarged functional capabilities.

1 cl, 1 dwg

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RU 2 312 424 C1

Authors

Gorlov Mitrofan Ivanovich

Zharkikh Aleksandr Petrovich

Dates

2007-12-10Published

2006-04-24Filed