FIELD: microelectronics.
SUBSTANCE: proposed device that can be used for manufacturing semiconductor items and for analyzing causes of their failure at user's enabling action on open chip with ion stream formed at corona discharge upon their opening while saving contacts has base for mounting semiconductor item plate, enclosed chamber, corona discharge source, high-voltage power supply, regulating member, reference voltage supply, current take-off resistor (100 kΩ), voltmeter, semiconductor item technical data meter, probe handler, probe handler-to-probe coupling unit, pressure gage, and pump.
EFFECT: enhanced precision of diagnostics, enlarged functional capabilities.
1 cl, 1 dwg
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Authors
Dates
2007-12-10—Published
2006-04-24—Filed