METHOD FOR SORTING SEMICONDUCTOR PRODUCTS ON A BOARD Russian patent published in 2008 - IPC G01R31/26 

FIELD: microelectronics, possible use in technology for manufacturing semiconductor products, having p-n transitions, and also for analyzing products which failed at consumer side, allowing after opening with preservation of contacts to affect the open crystal with a stream of ions, generated during corona discharge.

SUBSTANCE: method for sorting semiconductor products on a board includes using effect of electric field, created by corona discharge, polarity of which corresponds to inversion of p-n transition, measuring current through dielectric, resulting from corona discharge. Also performed is measurement of volt-ampere characteristics or volt-farad characteristics, or ampere-noise characteristics at increased or decreased atmospheric pressure with currents flowing through dielectric, set on representative selection of semiconductor products; on basis of maximal spread of volt-ampere characteristics or volt-farad characteristics or ampere-noise characteristics, measured at values of current in dielectric from 10^-7 to 10^-4 A/cm², determined respectively are standard volt-ampere characteristics or volt-farad characteristics or ampere-noise characteristics; and on basis of comparison between respectively measured volt-ampere characteristics or volt-farad characteristics or ampere-noise characteristics to standard ones the batch of semiconductor products is divided onto less reliable and reliable products.

EFFECT: increased precision of diagnostics and expanded functional capabilities of semiconductor product control on a board with usage of corona discharge.