FIELD: physics; measuring.
SUBSTANCE: invention concerns to the devices measuring angular velocity, in particular, to micromechanical gyroscopes (MMG) of vibrating type. The MMG contains the basis made from silicon with stators mounted on it through isolating stratums and a seat on which with the help torsions the curl is suspended, and a cover from silicon with the isolating stratum superimposed on it on which electrodes are located and the electronic block with the power supply. The basis and a cover are welded on perimetre. The signal outputs of the electronic block are joined to deductions from stators, a curl and electrodes, deductions, at least, from the basis or cover silicon are joined to a blanket deduction of the power supply. Besides, on an outside surface of silicon of a cover and/or the basis the metallisation stratum is superimposed. Introduction of an additional deduction from the basis and-or cover silicon and as drawing of an additional stratum of metallisation by an outside surface of silicon of a cover and/or the basis allow to reduce influence of spurious couplings between power and signal electrodes of the MMG.
EFFECT: reduction of influence of spurious couplings between power and signal electrodes of the MMG.
2 cl, 4 dwg
