METHOD OF DEEP PURIFICATION OF AMMONIA Russian patent published in 2008 - IPC C01C1/02 C01C1/12 

FIELD: chemistry.

SUBSTANCE: invention pertains to methods of purifying substances and relates to design of a method of deep purification of ammonia, used in the technology of obtaining epitaxial structures of nitrides of silicon, gallium, aluminium and other materials, used in opto- and microelectronics. The method involves filtration of gaseous ammonia at temperature lower than 0°C and pressure lower than 200 mmHg. The ammonia stream is filtered through a low-temperature zone with linear speed less than 10 cm/s. After filtration, the ammonia is cleaned through vacuum distillation. Purity of the ammonia in relation to content of the basic component is more than 99.99996% of the volume.

EFFECT: simple implementation and high level of industrial safety of the method.

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