METHOD OF PURIFYING LIQUIDS, VOLATILE ALKYLSILOXANES AND ALKYLSILAZANES Russian patent published in 2012 - IPC C07F7/20 C07F7/10 C07F7/18 

Abstract RU 2447078 C1

FIELD: chemistry.

SUBSTANCE: invention relates to fine purification of alkylsiloxanes and alkylsilazanes which are used in making light-sensitive resistors and in microelectronics. Disclosed is a purification method comprising three basic steps: fractionation, filtration in liquid and vapour phases on porous polymer filters with pore size 0.1-0.2 mcm and evaporation, followed by condensation in bubble-free conditions at evaporation rate of 0.01-0.2 cm3/h·cm2.

EFFECT: disclosed method enables to obtain highly pure alkylsiloxanes and alkylsilazanes with basic substance content of about 99,99 wt % and content of heterogeneous trace elements less than 10 particles per cm3.

1 cl, 6 ex

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RU 2 447 078 C1

Authors

Grinberg Evgenij Efimovich

Levin Jurij Isaakovich

Sandu Roman Aleksandrovich

Ukhin Vladimir Ivanovich

Rjabtseva Marina Viktorovna

Strel'Nikova Inna Evgen'Evna

Dates

2012-04-10Published

2010-11-08Filed