METHOD OF TUNGSTEN HEXAFLUORIDE PURIFICATION Russian patent published in 2008 - IPC C01G41/04

Abstract RU 2342323 C1

FIELD: chemistry.

SUBSTANCE: invention can be used for obtaining tungsten hexafluoride of high purity, which is used in microelectronics, in tellurite glass synthesis. Method of tungsten hexafluoride purification includes distillation with further filtration of flow of gaseous product through fluorine-layer fibrous filter. Distillation of tungsten hexafluoride is carried out with evaporation rate not higher than 5·10^-4 g/(cm²·sec), and filtration - during passing of gaseous tungsten hexafluoride through the filter with linear rate 0.3-1 cm/sec.

EFFECT: increasing purity of tungsten hexafluoride with respect to metal admixtures.

2 tbl, 1 ex

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RU 2 342 323 C1

Authors

Moiseev Aleksandr Nikolaevich

Kraev Igor' Aleksandrovich

Dates

2008-12-27—Published

2007-10-24—Filed