FIELD: measuring techniques.
SUBSTANCE: sample, the area of horizontal surfaces of which is much bigger than the area of the sides, is bombarded by a stream of gas plasma. The value of rejected heat is determined, and the value of the unknown temperature is determined using the proposed formula.
EFFECT: analytical determination of the temperature of the surface of the sample, irradiated by a gas plasma, with the objective of its registration and control in vacuum-plasma processing.
1 dwg
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