FIELD: electronics.
SUBSTANCE: invention can be used when making semiconductor devices, liquid crystal displays, photomasks and other products. The control method involves illuminating the controlled object with radiation in the optical range from a point source and analysis of the reflected light image on a special screen. There is successive measurement of the intensity of elements of the image of the given dimension with subsequent calculation of X, Y and Z coordinates of the controlled surface.
EFFECT: obtaining quantitative characteristics of a controlled surface.
11 dwg
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