FIELD: physics, measurement.
SUBSTANCE: method involves reference measurement, change of gap by a value not less than reference value, additional measurement of changed gap and gap value correction with account of reference and additional measurement results and reference gap change value. Results of reference, additional and other measurement series are defined as averages of measurement series at given limit value approximation accuracy, while minimum reference gap change value is defined on the basis of reference and additional measurement error, permissible gap measurement accuracy, error of gap change by reference value, and corrected gap value. Vibration movement of controlled surface is defined on the basis of corrected results of measurement series and gap averages in any measurement series where maximum gap value does not exceed value used for selection of reference gap change value.
EFFECT: enhanced accuracy of contact-free measurement.
13 dwg
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Authors
Dates
2008-11-10—Published
2007-05-08—Filed