FIELD: physics, optics.
SUBSTANCE: invention is related to thin-film structures in devices of micro-electromechanical systems and to electromechanical and optical responses of this thin-film structures. Device of micro-electromechanical systems (MEMS) comprises substrate, electrostatically displaced layer, electrode placed on substrate, air gap is located between electrode and displaced layer, layer of electric charges catching comprising material that is able to catch both positive and negative charges, transparent layer formed between layer of electric charges catching and electrode. Another two versions of MEMS device are also suggested, as well as two versions of MEMS manufacture.
EFFECT: provision of improved characteristic (electromechanical) response.
22 cl, 9 dwg
