FIELD: physics.
SUBSTANCE: invention relates to devices based on micro-electromechanical systems (MEMS-devices) and particularly to thin-film structures in devices based on micro-electromechanical systems and to electromechanical and optical response of such thin-film structures. This method involves the following steps: preparation of a first layer containing a film with characteristic electromechanical response and characteristic optical response, where the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and the characteristic electromechanical response of the said first layer is measured by at least reducing charge accumulation on it when the said device based on micro-electromechanical systems is switched on.
EFFECT: design of an efficient method of making a device based on micro-electromechanical systems.
71 cl, 14 dwg
