MICROELECTROMECHANICAL DEVICE WHEREIN OPTICAL FUNCTION IS SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION Russian patent published in 2013 - IPC G02F1/01

Abstract RU 2475789 C2

FIELD: physics.

SUBSTANCE: microelectromechanical device (800) has a substrate (20), having a top surface (88), a movable element (810) lying on top of the substrate (20), and an activating electrode (82). The movable element (810) has a deformable layer (34) and a reflecting element (814) which is mechanically connected to the deformable layer (34). The reflecting element (814) has a reflecting surface (92). The activating electrode (82) lies to the side of the reflecting surface (92).

EFFECT: movable element is configured, in response to voltage difference formed between the activating electrode and the movable element, to demonstrate a reaction in form of displacement in a direction which is essentially perpendicular to the top surface of the substrate.

34 cl, 77 dwg

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RU 2 475 789 C2

Authors

Ehndish Dehnis

Mignard Mark

Dates

2013-02-20—Published

2008-06-24—Filed