FIELD: physics.
SUBSTANCE: optical electromechanical device has a conducting optical absorber formed over a substrate, at least one supporting structure which is formed over the substrate, a conducting deformable layer formed on top of said at least one supporting structure, lying at a distance from the conducting optical absorber and configured for electrostatic deflection towards the optical absorber, and a conducting bus structure lying in the optically inactive region of the electromechanical device and electrically connected to said optical absorbing layer.
EFFECT: easy manufacture in the same manufacturing systems.
35 cl, 23 dwg
