FIELD: chemistry.
SUBSTANCE: atmospheric hydrogen plasma is produced in plasma generator 1. Mix of hydrogen and silicon tetrachloride is fed tangentially, through 3 to 8 torus-like pipeline inlets into mixing chamber 5. Transport hydrogen and plasma hydrogen-to-silicon tetrachloride molar ratio is kept up equal to (1.5÷2.0):1. The mix of hydrogen, trichlorosilane and hydrogen chloride produced in hydrogen reduction reactor 2 is fed into condensation unit 22.
EFFECT: improved method of producing trichlorosilane.
2 cl, 2 dwg
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