METHOD FOR DETERMINATION OF ELLIPSOMETRIC PARAMETERS Russian patent published in 2009 - IPC G01N21/21 

FIELD: physics, measurement.

SUBSTANCE: invention is related to the field of materials research and analysis with the help of optical means and may be used for determination of phase composition of solid-phase mixture, when it is required to detect one of compounds or to determine composition of mixture, and also to assess availability of admixtures in the substance. Method includes placement of sample on substrate located on ellipsometer specimen stage, illumination of specimen surface under preset angle by polarised light beam, determination of relative changes of amplitude ψ and phase Δ of linear polarised monochromatic light wave in several points of specimen. Ellipsometric parameters are measured 30-100 times by means of specimen displacement relative to direction of light beam drop, then conventional indicators of refraction η(f) are calculated, as well as coefficients of specimen absorption k(f) in every point, obtained values η(f) and k(f) are arranged in row in ascending order, row is divided into equal intervals with pitch H, and frequency ω is defined that corresponds to number of η(f) values that are present in every interval, afterwards ellipsogram is built in coordinates η(f)-ω and compared to ellipsograms of corresponding pure substances.

EFFECT: expansion of application field.

4 dwg