ELLIPSOMETER Russian patent published in 2007 - IPC G01N21/21 

FIELD: the claimed invention refers to the field of ellipsometers.

SUBSTANCE: the ellipsometer has a lighter, a polarizer, two measuring parallel channels, a phase and an amplitude, optically not connected between themselves. At that the indicated elements are optically connected with possibility of feeding of a beam of light from the lighter to the polarizer, from the polarizer - on the investigated sample and further on the measuring channels, has a light-separating element cutting off a part of the light beam reflected from the surface of the sample into the phase channel and executing at that simultaneously a function of an a achromatic phase-shifting element. The light-separating element is fulfilled in the shape of a pentahedral prism, the facets of the prism are fulfilled with possibility of light falling perpendicularly relatively to the entrance facet, its successive reflection from the three other facets with fulfilling on each of them of the condition of the full inner reflection and the exit perpendicularly to the exit facet with provision of a summary phase shift equal to 900 for the center of the spectral interval(600 nm); the light-separating element is fulfilled out of quartz glass.

EFFECT: increases accuracy of measuring and expands spectral range of conducted measurements.

25 cl, 2 dwg