FIELD: charged particles accelerators.
SUBSTANCE: invention relates to accelerators of charged particles: ions or electrons and can be used in the development of electron beam devices. The source contains a housing with a charged particle output window, inside which an anode is located, made in the form of a discharge chamber housing. The anode contains a perforated part, parallel to the plane of the window for the output of charged particles and a magnetic system consisting of permanent magnets installed differently polar with respect to each other, and a magnetic circuit made of a ferromagnetic material. The source cathode consists of a cathode plate installed parallel to the perforated part of the anode. The magnetic system is installed on the cathode plate and contains magnets with poles of the same polarity located along the perimeter of at least one closed circuit, inside which magnets with poles of opposite polarity are installed at equal distances from the magnets located along the perimeter.
EFFECT: obtaining a large-area beam with a simultaneous increase in the uniformity of the current density distribution over the beam cross section.
5 cl, 5 dwg
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Authors
Dates
2023-02-01—Published
2022-04-19—Filed