METHOD FOR PERFORMANCE OF QUANTITATIVE MASS-SPECTROMETRIC ANALYSIS OF GAS MIXTURE COMPOSITION Russian patent published in 2009 - IPC G01N27/64 

FIELD: physics, measurement.

SUBSTANCE: method for quantitative mass-spectrometric analysis of gas mixture composition, consisting in performance of device calibration, registration of mass-spectrum of investigated gas mixture, detection of components included into investigated mixture by means of identification of mass-spectrum and calculation of their concentrations. Device calibration is carried out by individual gases by means of simultaneous registration of mass-spectrum and absolute gas pressure in system of mass-spectrum discharge, then coefficients of absolute sensitivity are detected, which relate intensity of this gas ion current with its pressure, and simultaneously to registration of mass-spectrum of investigated mixture, absolute pressure is registered in system of mass-spectrum discharge, and calculation of gas mixture components concentrations is carried out in compliance with suggested formula.

EFFECT: provision of possibility to perform detection of concentration of separate gas mixture components in case of availability of unknown components in it without preparation of reference calibration mixtures, besides accuracy of measurements does not depend on number of mixture components.

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