FIELD: measuring equipment.
SUBSTANCE: stand for calibrating the device of mass spectrometric gas flow measurements comprises a gas inlet chamber connected to the pressure sensor, not sensitive to the gas genus, a gas flow recording camera coupled with the mass spectrometer and the combined full-range gas pressure sensor, a vacuum pumping system for chambers, the gas inlet chambers and the gas flow recording chambers are connected to the line with a valve, wherein a gas-permeable membrane is installed on the line end introduced into the gas inlet chamber, in addition, the gas inlet chambers and the gas flow recording chambers are connected by the line with the two valves, between which a calibrated flow of the gas flow molecular mode is installed.
EFFECT: invention provides calibration of the mass spectrometric device in a wide range of the measured gas flows.
2 cl, 4 dwg
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