FIELD: physics.
SUBSTANCE: method of calibrating a mass-spectrometer for quantitative analysis of gas mixtures involves determining sensitivity coefficients for individual gases based on recorded mass-spectrometer intensity peaks and gas pressure in the discharge system of the mass spectrometer. Sensitivity coefficients of the device for individual gases are determined after making a series of analyses of individual gases and gas mixtures with different content of components. The sensitivity coefficients are determined by solving a system of linear equations of the type by a least-square method, where Pi is gas pressure in the discharge system of the mass-spectrometer; is the reduced intensity of ion current of the j-th component in the i-th gas mixture; n is the number of analyses; m is the number of sensitivity coefficients, n≥m.
EFFECT: method of calibrating a mass-spectrometer without preparing reference gas mixtures.
2 tbl
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Authors
Dates
2013-03-27—Published
2011-08-10—Filed