ACOUSTOELECTRIC SURFACE ACOUSTIC WAVE SENSOR Russian patent published in 2009 - IPC H03H9/25 

FIELD: physics.

SUBSTANCE: invention relates to acoustoelectric devices on surface acoustic waves (SAW) and can be used for determining physical and chemical parametres of gaseous media (liquids), mainly for designing wireless remote analytical systems based on surface acoustic wave sensors and radio frequency identification systems. The acoustoelectric surface acoustic wave sensor has two monocrystalline piezoelectric-crystal plates separated by a vacuum gap, on the inner surface of one of the plates of which there are two identical, oppositely placed interdigital transducers, one of which is the input transmitting, which coverts the input electric signal into an electroacoustic wave and an output receiving, which converts the electroacoustic wave λ into an electric signal; the input port for inlet of gas or liquid into the vacuum gap; an output port for outlet of gas or liquid from the vacuum gap. Thickness of the piezoelectric-crystal plates H₁, H₂ is less than or comparable to wavelength λ, and width of the vacuum gap H is less than wavelength λ.

EFFECT: increased sensitivity and efficiency, which allows for using the invention in making high-efficiency acoustoelectric gas and liquid analysers.

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