PASSIVE WIRELESS SURFACE ACOUSTIC WAVE ULTRAVIOLET RADIATION SENSOR Russian patent published in 2017 - IPC H01L31/101 H03H9/25 

FIELD: physics, measurement equipment.

SUBSTANCE: invention refers to the field of microelectronics and regards passive wireless UV sensor. The sensor includes a piezoelectric substrate on the working surface of which in one acoustic channel a unidirectional transceiving interdigital transducer (IDT), and two reflective IDTs are located. A dielectric substrate transparent for UV-radiation and provided with a UV-sensitive semiconductor film is located between the reflective IDTs parallel to the substrate surface, at a distance not exceeding the length of a surface acoustic wave the central IDT frequency. The film is located on the surface facing the piezoelectric substrate. A transceiver antenna is connected to the transceiving IDT. Supports located outside the acoustic channel and on its both sides are arranged between the semiconductor film and the piezoelectric substrate to ensure clearance.

EFFECT: invention provides a possibility of measurement without application of additional RF signal generation circuts and voltage sources.

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