FIELD: mechanics.
SUBSTANCE: device comprises a polarizer and an analyser of a fast-response laser ellipsometre. The device comprises also a table for the samples holding and nozzles for the supply of gas-vapour mixture directly into the ellipsometric measurement zone. The above elements are fixed on a rigid frame. The device comprises a gas-vapour mixture preparation unit with the inlet of the latter being connected to a pure gas cylinder through a reducer. The outlet of the gas-vapour mixture preparation unit is connected to the nozzle through which the gas-vapour mixture is supplied.
EFFECT: improved reliability of the device due to the simplified design and considerable speed-up of the measurement cycle.
2 cl, 5 dwg
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