SPECTRAL MAGNETOELLIPSOMETER WITH DEVICE FOR MAGNETO-RESISTIVE MEASUREMENTS Russian patent published in 2015 - IPC G01N21/21 B82B1/00 

Abstract RU 2549843 C1

FIELD: instrumentation.

SUBSTANCE: magnetoellipsometer contains a radiation source with a monochromator, a polariser armfitted with a position switch from 0° to 45°, a magnetic system for effecting a sample, an analyser arm of an ellipsometer fitted with the position switch from 0° to 45°, the controller with a detector for synchronous measurement of light fluxes, and also the magnetoresistance measurement unit assembled according to the quadripolar measuring bridge circuit and consisting of three resistors and one replaceable module designed as a substrate onto which the witness sample is sputtered with the composition identical to that of the studied sample, and the magnetic system is designed as a pair of optimised Helmholtz's coils and perpendicularly located solenoid.

EFFECT: expansion of functionality of the ellipsometer verification method, improvement of accuracy of measurements, obtaining the additional information on electric or magnetic properties within a uniform method.

4 dwg

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RU 2 549 843 C1

Authors

Morchenko Aleksandr Timofeevich

Judanov Nikolaj Anatol'Evich

Chitanov Denis Nikolaevich

Komlev Aleksandr Sergeevich

Panina Larisa Vladimirovna

Kostishin Vladimir Grigor'Evich

Dates

2015-04-27Published

2013-11-08Filed