ELLIPSOMETER COMPLEX FOR HIGH-TEMPERATURE RESEARCH Russian patent published in 2009 - IPC G01N21/21 

FIELD: physics.

SUBSTANCE: complex includes unit of optic measurements, system for heating of researched samples, system for temperature control and calculating unit. Unit of optic measurements based on fast-acting ellipsometer is equipped with microscope objective for focusing of probing radiation at researched sample, diaphragm and light filter that prevent ingress of parasite radiation into measuring track. In system for heating supply contacts to heater are made of graphite, with surface lubricated by liquid gallium. Heating system may be equipped with jacket that isolates it from external atmosphere with the possibility to realise flow mode of inertial gas. Analog-measuring part of control calculating unit is arranged in the form of four channels for signal reading from unit of optical measurements. Every channel is equipped with controller of amplifier ratio connected to inlet of analog-digital transducer. Microcontroller system comprises subsystems for data accumulation, subsystems for predicative control of amplifier ratio, subsystem for measurement of temperature and subsystem of data transmission to personal computer.

EFFECT: increased accuracy of measurements.

7 cl, 2 dwg