CAPACITIVE TRANSDUCER OF ABSOLUTE PRESSURE Russian patent published in 2009 - IPC G01L9/12 

FIELD: measuring technology.

SUBSTANCE: invention refers to measuring technology, particularly to transducers of absolute pressure and can be implemented in development and production of compact semi-conducting transducers of absolute pressure. The capacitive transducer of pressure consists of a padding whereon there are arranged a contact platform and armatures of a condenser; the armatures of the condenser consist of an electrode and of an insulating layer; also the transducer consists of a membrane assembly and a vacuum chamber; the insulating layer is located under the electrode, while the membrane assembly is made of two connected silicon membranes with the applied thereon armatures of the condenser and glass washers; the membranes are connected to one another and levelled, and the glass washers with openings are connected to membranes from the side opposite to armatures of the condenser; the vacuum chamber is formed with pressure tight connection of the membrane assembly with the metal case; the electrodes are taken outside the metal case by means of the contact platforms, micro-wires and pressure tight adaptors; on one side micro-wires are welded to the contact platforms, while on the other side they are welded to the pressure tight adaptors; the pressure tight adaptors are leak-free connected to a metal washer; the metal washer is welded to the metal case; volume of the vacuum chamber exceeds volume of the membrane assembly several times.

EFFECT: enhanced reliability, stability of parameters and raised sensitivity of transducer.

2 cl, 1 dwg