METHOD OF MAKING CAPACITIVE PRESSURE TRANSDUCERS Russian patent published in 1995 - IPC

Abstract RU 2051347 C1

FIELD: automatic control systems. SUBSTANCE: elements of the transducer described are made by photolithographic method. Battery of transducers is treated at 160-170 deg C under pressure of 30-35 kg/sq.cm during 50-60 minutes. Elements of the transducer are subject to mechanical-thermal treatment to improve adhesion by layers of dielectric films. High efficiency of operation is achieved due to simultaneous making of several transducers onto the same substrate. Transducers are made of foil dielectric film, glass-cloth-base laminate, and metal foil, covered with thin layer of dielectric film. EFFECT: improved efficiency. 2 dwg

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RU 2 051 347 C1

Authors

Kazarjan A.A.

Chekrygin V.N.

Dates

1995-12-27—Published

1992-02-25—Filed