COOLED INFRARED RADIATION DETECTOR ARRAY WITH DIAPHRAGM AND METHOD OF MAKING SAID DIAPHRAGM Russian patent published in 2009 - IPC H01L31/02 

FIELD: physics; semiconductors.

SUBSTANCE: cooled infrared radiation detector array has a holder, a photosensitive element glued to raster, and a diaphragm. According to the invention, the diaphragm consists of n cylindrical components (1) with disc-shaped bases (2). Inner surfaces of the cylindrical components and disc-shaped bases are depolished and blackened. Outer surfaces of cylindrical components are polished to a mirror finish. Raster (6) is glued to the cooled holder (4). A photosensitive element (3) is glued to the raster. Components with bases are glued to each other using cryostable glue (5). The diaphragm is glued to the raster. A method for making the diaphragm is also disclosed, involving lathing n cylindrical components with disc-shaped bases. Outer surfaces of the components are polished, mirror polished and protected with acid resistant sealing material. Inner surfaces of components and bases are depolished and thinned in an acid etchant. Inner surfaces of components and bases are blackened. The sealing material is removed from outer surfaces of the components. Components with bases are glued together.

EFFECT: prevention of additional parasitic background noise and low values of useful signal of the radiation object, as well as increased threshold sensitivity.

3 cl, 2 dwg, 2 ex