PROBE FOR LOCAL ANODE OXIDATION OF MATERIALS Russian patent published in 2010 - IPC H01J1/00 C25D11/00 

FIELD: electricity.

SUBSTANCE: invention is related to the fields of microelectronics, electrochemistry, micro- and nano-lithography, etc. and may be used for local anode oxidation of materials used in development of elements in microcircuits, micro- and nanostructures, micromechanical and sensor systems. According to invention, in probe for local anode oxidation of materials arranged in the form of needle with coating, electroconductive properties of needle and coating materials, as well as shape of needle coating are selected so that at least surface of needle point has dielectric properties, and remaining part of needle may transmit at least surface electric current, besides nearest point of needle electroconductive surface is distanced from extreme point of needle spike by distance of not more than 1 micrometre.

EFFECT: more than triple increase of available probe service life for local anode oxidation of materials, more accurate monitoring over process of local oxidation of materials and double increase of spatial resolution, with which nanostructures are formed on oxidised materials.

4 cl, 6 ex