MULTILAYER NANOCOMPOSITE FOR CAPACITORS AND METHOD OF ITS MANUFACTURING Russian patent published in 2011 - IPC H01G4/06 

FIELD: electricity.

SUBSTANCE: multilayer nanocomposite for capacitors comprises a substrate of graphite foil with density from 0.27 to 1.2 g/cm³, on the face surface of which there are the following layers arranged in sequence - a layer of amorphous aluminium oxide, a layer of titanium oxide of rutile modification and a layer of titanium nitride, formed by method of atomic-layer deposition. At the same time application of the aluminium oxide layer is done at 270-330°C by means of alternate pulse supply of the following precursors into the reaction chamber: trimethylaluminium and ozone. Application of the titanium dioxide layer is done at 450-500°C by means of alternate pulse supply of the following precursors into the reaction chamber: titanium tetrachloride and water, and application of the titanium nitride layer is done at the temperature of 460-490°C by means of alternate pulse supply of precursors, such as titanium tetrachloride and ammonia, into the reaction chamber.

EFFECT: development of a multilayer nanocomposite for capacitors with high specific energy intensity.

2 cl, 2 dwg