METHOD FOR PRODUCTION OF NANOELECTRONIC AND NANOMECHANICAL INSTRUMENTS Russian patent published in 2010 - IPC B82B3/00 

FIELD: nanotechnologies.

SUBSTANCE: application: in production of nanoelectronics and nanomechanical instruments by method of adsorption - desorption of separate atoms on substrate surface. In method for production of nanoelectronics and nanomechanical instruments by adsorption of separate atoms on surface of substrate and by desorption of separate atoms from substrate surface, instrument is produced by probe arranged perpendicularly to substrate as a combination of nanotubes from oxide bronze alloyed with emission-active atoms of interstitial element, with common formula AxMyOz, where A is symbol of interstitial element selected from elements related to I - III groups of periodical table of chemical elements, M - symbol of bronze-forming oxide element, O - symbol of oxygen, X,Y,Z - stoichiometric coefficients, at the same time atoms adsorbed on surface of substrate arrive from structural channels of probe nanotubes as electric current passes along structural channels due to electric diffusion in structural channels of nanotubes and evaporation from probe with further adsorption on substrate surface, and desorbed atoms from substrate surface arrive into structural channels of probe nanotubes as electric current passes along structural channels, introduction of atoms into structural channels and further electric diffusion of introduced atoms into structural channels of nanotubes.

EFFECT: invention provides for durable operation of probe and improves repeatability of shape in produced elements of nanostructures.

2 cl, 14 dwg, 4 tbl