FIELD: electricity.
SUBSTANCE: invention relates to sensor (10) to produce data on intensity of electron beam generated with the help of electronic beam generator along trajectory, through which electronic beam comes out of generator through outlet window (24), and also relates to the system for production of data on intensity of electronic beam. Invention differs by the fact that sensor (10) comprises conductor (26) installed within the limits of trajectory and exposed for outlet window (24). And insulating body (28) for screening of conductor (26), specified body (28) is engaged with outlet window (24), producing a chamber (30) together with a specified outlet window (24). And also by the fact that conductor (26) is positioned inside specified chamber (30).
EFFECT: screening of conductor against plasma impact.
19 cl, 5 dwg
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Authors
Dates
2010-05-20—Published
2006-10-13—Filed