FIELD: machine building.
SUBSTANCE: procedure consists in creating high temperature gas flow in combustion chamber of high rate sprayer by means of combusting fuel in oxidant, in supply of fluid source material, as source of nano-particles formation, into combustion chamber of high rate sprayer, in formation, heating and transfer of nano-particles by means of high speed gas flow and in settling nano-particles on substrate. Also fluid source material is simultaneously used as fuel for creating high temperature gas flow. Source material corresponds to a true or colloid solution of organic and/non-organic compounds in organic solvent or mixture of several solvents.
EFFECT: facilitating production of high quality nano-structured particles with standard equipment for high rate sputtering by simple and efficient procedure.
8 cl, 1 dwg, 3 ex
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