FIELD: physics.
SUBSTANCE: proposed transducer comprises housing with two chambers filled with slightly compressible insulating liquid. Each chamber is sealed by profiled diaphragm arranged with clearance relative to said housing to take up pressure. Semiconductor piezoresistive sensitive element is tightly fitted between aforesaid chamber in said housing. Additionally, differential pressure transducer incorporates second semiconductor piezoresistive sensitive element arranged between said chambers in opposition to first semiconductor piezoresistive sensitive element, as well as bellows and compression springs to protect sensitive elements against destruction.
EFFECT: higher stability.
1 dwg
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Authors
Dates
2010-07-27—Published
2009-01-29—Filed