PRESSURE DIFFERENCE SENSOR Russian patent published in 2008 - IPC G01L13/02 

FIELD: physics.

SUBSTANCE: invention pertains to measuring techniques, specifically to piezoresistive pressure sensors, and can be used when measuring pressure differences in liquids and gases. The essence of the invention lies in that, the pressure difference sensor consists of case with two planes, filled with a dielectric liquid. The cavities are sealed by two profile membranes, to which pressure is applied. Between the cavities in the case, a third membrane is sealed together with a fixed semiconductor piezoelectric element. There are two discs and two springs which press the discs on to the membrane from two sides. One of the discs located in one of the cavities has diameter larger than the diameter of the other cavity, and the force of the spring pressing this disc to the membrane, is more than the force of the spring pressing the other disc. This allows for immobility of all three membranes in the operating mode of measuring pressure difference, and consequently, elimination of the effect of defect elastic properties on the accuracy of measurement.

EFFECT: reduced errors of measurements.

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