SPECTRAL REFLECTOMETRY METHOD AND DEVICE Russian patent published in 2010 - IPC G01J3/45 

FIELD: physics.

SUBSTANCE: invention can be used to obtain an image which is free from coherent interference related to presence of self-interference of radiation scattered from the object under analysis and presence of spurious reflections in the optical channel of a system. Two or more successive measurements of the interference spectrum are taken. During at least one measurement of the interference spectrum using a radiation interference control unit, there is modulation of the phase between the interfering parts of the radiation in accordance with a defined law during the exposure time, which leads to averaging of the favourable interference phase, and during at least one extra measurement of the interference spectrum, phase between interfering parts of the radiation during exposure time is not modulated. The phase between interfering parts of radiation in extra measurements of the interference spectrum can be different.

EFFECT: invention enables to obtain an image with complete elimination of coherent interference without loss of power of the radiation scattered by the object at considerable speed values of the object.

10 cl, 3 dwg