FIELD: technological processes.
SUBSTANCE: device comprises three sources of laser radiation and three according matrix registration devices. In order to improve accuracy of monitoring, it is equipped with three phase elements, every of which is arranged in the form of reflecting plate with microrelief on its external reflecting surface arranged at the angle to optical axis of laser radiation in appropriate source, having the possibility to rotate and move in two mutually perpendicular planes. At the same time matrix devices of registration are arranged with the possibility of rotation and displacement in two mutually perpendicular planes, and height of microrelief on reflecting surface of phase elements is identified by given dependence.
EFFECT: improved accuracy of monitoring.
4 dwg
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