PROCEDURE FOR SPUTTERING FINE-GRADE POWDER MATERIALS AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2010 - IPC C23C24/04 B05B7/14 

Abstract RU 2399695 C1

FIELD: metallurgy.

SUBSTANCE: procedure consists in generating gas-powder flow, in its acceleration in nozzle and in transfer onto sputtered surface of item. Also there are used particles of powder of 0.01-1 mcm size. Upon acceleration of the powder flow and before sputtered surface there is created a continuous conic zone in the flow with acute angle at vertex directed opposite to supersonic flow, wherein direct shock of compaction of the gas-powder flow is transformed into oblique shocks. The facility for implementation of this procedure consists of a source of compressed gas, of a powder metering device, of a gas heater, of a super-sonic nozzle, and of a control system. Also a needle is positioned behind a cut of the super-sonic nozzle and coaxial to it; distance from the top of the needle to the nozzle cut and surface of the sputtered item can be changed.

EFFECT: decreased powder consumption.

2 cl, 4 dwg, 2 ex

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RU 2 399 695 C1

Authors

Alkhimov Anatolij Pavlovich

Fomin Vasilij Mikhajlovich

Kosarev Vladimir Fedorovich

Klinkov Sergej Vladimirovich

Dates

2010-09-20Published

2008-12-29Filed