METHOD OF SPUTTERING GAS-THERMAL COATINGS ON INNER SURFACES AND ITS IMPLEMENTATION DEVICE Russian patent published in 2018 - IPC C23C4/126 C23C24/04 

FIELD: technological processes.

SUBSTANCE: invention relates to the technology of gas-thermal coatings sputtering and can be used in engineering, aerospace, rocket and space technology, machine-tool construction, oil and gas production, energy and urban networks. Method for gas-thermal coatings sputtering onto the inner surfaces of the article includes feeding particles of the sputtered material into the gas stream, accelerating the resulting two-phase flow in the nozzle block and coating the inner surface of the article in a perpendicular direction to the sputtered surface. Gas stream is divided into a main and at least one additional gas stream; particles of the sputtered material are introduced into the main gas stream at the subsonic portion of the nozzle block main nozzle and achieve the supersonic speed of a two-phase flow in the main nozzle. Achievement of supersonic speed for each of the at least one additional gas stream is provided in at least one additional planar supersonic nozzle of a rectangular or trapezoidal section located successively behind the main nozzle in the outlet portion thereof. At the outlet of the main nozzle, two-phase flow is effected successively by at least one additional supersonic flow directed at an angle to the main two-phase flow. Gas-thermal coatings sputtering device comprises a nozzle block in the form of a tube with a constriction and subsequent expansion in the inlet part, which contains a main supersonic nozzle with an oblique cut, made in the form of a tube of a rectangular or trapezoidal section with asymmetric tapering and expanding sections. Two-phase flow deprivation angle from the original direction is determined by the geometry of the expanding section of the supersonic nozzle. Said nozzle unit comprises one or more additional supersonic nozzles of a rectangular or trapezoidal section located successively behind the main nozzle in the outlet. Rear wall of the supersonic portion of each of the at least one additional said supersonic nozzle is directed at an angle to the direction of the main two-phase flow.

EFFECT: rotation of the two-phase flow by an angle close to the normal to the sputtered inner surface, accompanied by the acceleration of the two-phase flow to supersonic, and also the exclusion of collisions of the sputtered particles with the walls of the nozzle block.

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