PROCEDURE FOR SURFACE GAS-DYNAMIC PROCESSING WITH POWDER MATERIAL AND FACILITY FOR ITS IMPLEMENTATION Russian patent published in 2010 - IPC C23C24/04 

FIELD: metallurgy.

SUBSTANCE: procedure consists in supply of particles of powder material into super-sonic nozzle, in acceleration of particles with super-sonic gas flow and in directing particles on surface of substrate. To accelerate powder material there is used a flat or axis-symmetrical nozzle made with length of a super-sonic part and specific dimension of critical cross-section corresponding to conditions L=4.35ρ_pd_p±50%; b=0.065ρ_pd_p±50%, where L is length of the super-sonic part of the nozzle, m, d_p is diametre of particles of powder material, m, b is thickness of the flat nozzle (b=h), m, or b is diametre of critical cross-section of the axis-symmetrical nozzle (b=d_cr), m, ρ_p is density of material of particles, kg/m³.

EFFECT: raised efficiency of processing, increased coefficient of sputtering and upgraded quality of coating at gas-dynamic sputtering.

2 cl, 1 dwg, 5 ex